SILICON-NITRIDE 0 7.595000 7.595000 5.800000 90.000000 90.000000 120.000000 2.000000 0 0 1 1 1 28 2 1 N 0.849630 0.739640 0.000000 0.300000 1.000000 1 N 0.155340 0.705820 0.000000 0.300000 1.000000 1 N 0.532240 0.435860 0.000000 0.300000 1.000000 1 N 0.482790 0.735640 0.000000 0.300000 1.000000 1 N 0.155340 0.705820 0.000000 0.300000 1.000000 1 N 0.532240 0.435860 0.000000 0.300000 1.000000 1 N 0.849630 0.739640 0.000000 0.300000 1.000000 1 N 0.482790 0.735640 0.000000 0.300000 1.000000 1 N 0.877340 0.376220 0.000000 0.300000 1.000000 1 N 0.926790 0.076450 0.000000 0.300000 1.000000 1 N 0.559950 0.072540 0.000000 0.300000 1.000000 1 N 0.254240 0.106260 0.000000 0.300000 1.000000 1 N 0.877340 0.376220 0.000000 0.300000 1.000000 1 N 0.926790 0.076450 0.000000 0.300000 1.000000 1 N 0.559950 0.072540 0.000000 0.300000 1.000000 1 N 0.254240 0.106260 0.000000 0.300000 1.000000 2 Si 0.015220 0.637580 0.000000 0.300000 1.000000 2 Si 0.599150 0.580540 0.000000 0.300000 1.000000 2 Si 0.409580 0.812080 0.000000 0.300000 1.000000 2 Si 0.015220 0.637580 0.000000 0.300000 1.000000 2 Si 0.599150 0.580540 0.000000 0.300000 1.000000 2 Si 0.409580 0.812080 0.000000 0.300000 1.000000 2 Si 0.807620 0.228540 0.000000 0.300000 1.000000 2 Si 0.394360 0.174500 0.000000 0.300000 1.000000 2 Si 0.000000 0.000000 0.000000 0.300000 1.000000 2 Si 0.807620 0.228540 0.000000 0.300000 1.000000 2 Si 0.394360 0.174500 0.000000 0.300000 1.000000 2 Si 0.000000 0.000000 0.000000 0.300000 1.000000 ARM 2.800000 100.000000 0.200000 1000.000000 0.000000 0.000000 80.000000 Yes 3 0 0 0 1 0 0 2 0 0 -1500.000000 0.550000 0.000000 0.000000 0.000000 0.000000 x,y,z